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Blog: OEM Group PVD, RTP, and RIE Etch Systems Overview August 26, 2021
Blog: Plasma Process Chamber Corrosion Management August 25, 2021
Plasma-Therm ‘RANKED 1st’ in VLSI 2021 Survey for Etch & Clean Equipment – Marking 10 Consecutive Years July 13, 2021
Plasma-Therm Announces Acquisition of OEM Group PVD, RTP and Etch Business December 3, 2020
Plasma-Therm Announces Strategic Ion Beam Development and Licensing Agreement August 6, 2020
Plasma-Therm opens new regional office in Singapore July 29, 2020
Plasma-Therm announces new product names for select lines July 1, 2020
Plasma-Therm launches new facility in the United Kingdom April 8, 2020
Plasma-Therm adds systems, engineering expertise with acquisition of JLS Designs Ltd. March 24, 2020
Semiconductor Packaging News: VIEWPOINT 2020: Marco Notarianni, Ph.D., Process Engineering Manager, Plasma-Therm LLC January, 2020
Cornell NanoScale Facility (CNF) and Plasma-Therm Collaborate on Atomic Layer Etching (ALE) October 16, 2019
Plasma-Therm announces cooperation with Everspin Technologies Inc. October 1, 2019
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Read the 2021 Annual VLSIresearch Customer Satisfaction Survey Report
Plasma-Therm produces plasma etch, deposition, and singulation tools, including ICP, RIE, DSE™, IBE, IBD, PECVD, HDPCVD, and HDRF™ F.A.S.T.™-ALD.