Handler Upgrade for VERSALINE®

This upgrade is designed for VERSALINE systems configured with a cassette-to-cassette handler, sold until 2008 by Unaxis/Oerlikon under the name “Sidewinder” / VCx-100).

• OEM model handler, four-sided transport module, single-cassette load module
• Automated control of the handler through a Berkeley programmable controller.
• Slave control of robotic components

The following key automation components of the original handler cannot be replaced in the event of failure:

• Berkeley Process Controller (BXi)
• 3-Axis Robot (4.5S)
• Vacuum Elevator (48S)

To resolve these issues, Plasma-Therm has developed the VCx-series Handler Upgrade. The upgrade provides the following benefits:

• Replaces obsolete components, extending useful life of production equipment.
• Assures continued availability of spare parts.
• Includes robotics with high MTBF and tighter specifications.
• Fully multi-chamber compatible.
• Includes “Jog and Teach” feature and improved troubleshooting and logging.