PLASMA TECHNOLOGY DESIGNED FOR MAXIMUM PERFORMANCE

Premium plasma etch, deposition, and advanced packaging equipment for creating semiconductor devices that responsibly enhance the lives of people around the world.

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MEET OUR BRANDS

One Family. Multiple Brands. Endless Possibilities.

Discover the Plasma-Therm family of brands, united by a shared commitment to advancing semiconductor manufacturing. Together, our specialized technologies and expertise deliver innovative solutions from research and development through high-volume manufacturing.

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At Plasma-Therm®, we design and build configurable wafer processing platforms for standard and advanced processes used in microelectronics manufacturing. From etch and deposition applications to rapid thermal processing and plasma dicing, our systems keep pace with your needs and are engineered to provide outstanding performance time after time.

TECHNOLOGY

We continually improve our process system technology to deliver the best performance possible.

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MARKETS & APPLICATIONS

Our systems support etch, deposition, thermal, material modification and die singulation applications for existing and emerging microelectronics markets.

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