Upgrades & Retrofits
Through the Continuous Improvement Program, Plasma-Therm has developed
upgrades and retrofit packages for all product lines, including
legacy systems. Upgrades and retrofits can enhance capabilities,
improve reliability, and replace obsolete hardware.
An upgrade package for systems with VCx cassette-to-cassette "Sidewinder" handlers
replaces obsolete parts to ensure future system maintainability.
Ion beam etch and deposition systems
Plasma-Therm's advanced Marathon™ grid assemblies and
complete IBD and IBE source upgrades deliver improved performance and reliability.
These upgrades can be installed on ion beam systems from major
Marathon™ grid upgrades: High
performance, long-life grids enhance performance and cost of
ownership, providing greater than 2x longer grid life. Click IBD or IBE grids for more information:
Ion-beam source upgrades: High-performance
source with turnkey operating environment for stand-alone
operation or integration with your module. Click IBD or IBE
for more information:
Mask Etcher® series
- Easy-maintenance source
- Optical endpoint
- Computer system retrofit
- Edwards (Seiko Seiki STP 1303) magnetically levitated turbo
- Arm drive sensor retrofit
- Z-80 to Windows computer upgrade
Control system upgrades
Control system upgrades are available for most systems. Options include complete
upgrades to new computers with Cortex®, Plasma-Therm's advanced control system that runs
under Windows 7 and later versions.
Upgrade packages are also available to replace obsolete components without
changing existing control systems.
Upgrade packages are available with the following components to increase
productivity and expand the processing capabilities of installed systems:
- Turbo pumps
- RF components
- Throttle valves
- Slot valves
- Additional gas channels and secondary gas boxes for VERSALINE® systems