Tegal™ Etch Systems

TEGAL ETCH SYSTEMS ARE INDUSTRY PROVEN CASSETTE-TO-CASSETTE PLATFORMS FOR VOLUME MANUFACTURING

Plasma-Therm’s^® Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.

Tegal Legacy Systems

We support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.

Non-critical etches for a-Si, poly Si, SiNx, SiO2, and polymer thin films
Descum
Backside blanket thinning
Planarization for either unpatterned layers or masked layers down to 1µ feature size

Configurations for substrates of 75mm to 200mm, round and square
Up to 4 process gases
300W or 1000W RF power configurations
Auto match tuning

The Cortex® control system provides a stable, user-friendly control interface designed for efficiency and productivity. Cortex benefits include:

Graphical, SEMI-standard (E-95) interface
Comprehensive recipe editing and process parameter data logging and charting (real-time and post-processing)
Automated clean and conditioning routines with configurable triggers
Factory automation host interface (with optional SECS/GEM license)
User-level access control
Auto logging of alarms, jobs, calibration, and resource usage
Integrated with GLANCE™ data logging and visualization tool
Same feature-rich control system as used on high-volume production systems

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