Tegal™ Etch Systems

TEGAL ETCH SYSTEMS ARE INDUSTRY PROVEN CASSETTE-TO-CASSETTE PLATFORMS FOR VOLUME MANUFACTURING

Plasma-Therm’s^® Tegal 900 Series parallel-plate reactive ion etching (RIE) systems are industry standards for descum and noncritical dielectric etching. These systems, built for efficiency, reliability, and a small footprint, are available in both manual and cassette loading configurations.

Cortex Software Upgrade for Tegal RIE 900 Series

Enhance the performance and longevity of your Tegal RIE 900 Series tools with Plasma-Therm’s latest Cortex software upgrade. This field upgrade brings modern, high-performance features to your existing system, including a Windows PC, high-resolution touchscreen, and a multi-axis motor controller.

Designed for ease of integration, the Cortex upgrade is compatible with all Tegal RIE 900 Series systems using the Windows XP ACS PC controller. The upgrade can be completed in just 3 days on-site, minimizing downtime and maximizing operational efficiency.

Additional options, such as replacing obsolete RF power supplies, adding a programmable spectrograph, or enabling factory automation support with SECS/GEM and GLANCE, allow you to tailor the upgrade to your specific needs.

Key Benefits:

• Award-winning, intuitive user interface
• Full software support and updates
• Improved diagnostics and datalogging
• Enhanced factory automation capabilities

Stay ahead of the curve with the Cortex upgrade—future-proofing your equipment for years to come.

Tegal Legacy Systems

We support spare parts and upgrades for a wide range of Tegal legacy products including 901e, 903e, 901g, and 6500 HRe cluster tools.