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Product Solutions for the Renewable Energies Market1
 
 

Renewable Energies

As the global energy crisis intensifies, the need for renewable energy sources is greater than ever. Renewable energy is derived from a variety of sources: wind, hydro, biomass, geothermal and solar to name a few. Devices that assist in these processes through energy conversion make up the renewable energy technology market. Most relevant to semiconductor processing are solar cells and power devices.

Solar energy is renewable energy’s primary market driver and Plasma-Therm participates in this market with etch and PECVD process contributions to solar cell production.

Plasma-Therm systems have been in use for the production of wafer-scale photovoltaic (PV) and concentrated photovoltaic (CPV) solar cells for many years. Our technologies serving the solar market include etching of germanium (Ge) and gallium arsenide (GaAs), deposition of doped and intrinsic amorphous or micro-crystalline silicon, as well as deposition of silicon oxide and nitride.

Typical Applications

  • Etching for compound solar devices is achieved with high etch rates while maintaining profile control.
          - Ge
          - III-V materials

  • Deposition for R&D and production
          - Amorphous silicon
          - Doped
          - Intrinsic
          - Silicon Oxide
          - Silicon Nitride
          - Anti-Reflective Coatings

Products

 

For more information, contact us at information@plasmatherm.com or at +1.727.577.4999

 

   
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