Since 1974, Plasma-Therm has offered plasma etch and deposition solutions
for specialty applications. All Plasma-Therm systems, from the Apex SLR™
to VERSALNE®, Singulator®, and to the Vision™ Series,
provide highly accurate, repeatable results.
Plasma-Therm has collaborated with strategic partners such as DISCO for the Advanced Packaging market and memsstar (ORBIS™ platform) for dry release of MEMS devices.
A wide range of material handling options, including load lock and cassette load modules, match
Plasma-Therm systems to varied capacity requirements, from R&D labs to high-volume
All Plasma-Therm products are supported by award-winning service and support that
ensures high uptime and consistent process results. Our
customer-focused approach has been recognized with awards in the VLSIresearch Customer Satisfaction Survey
every year since 2000.
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