Increased Productivity with Process Control Tools

 
 
 

Process Control

Plasma-Therm’s internally developed process control software surpasses industry standards in repeatability and uniformity. Real-time endpoint monitoring of etch and deposition processes leads to reliable results.

EndpointWorks™

In the past, separate applications controlled various endpoint technologies. With Plasma-Therm’s newly developed EndpointWorks™, a single application addresses multiple endpoint sensor inputs. EndpointWorks™ is fully integrated with the process module control software.

EndpointWorks™ is capable of receiving inputs from many different sensors and then uses a “decision” feature to analyze the data to determine a highly reproducible endpoint.

The following sensor systems are available with EndpointWorks:

  • Laser Interferometry:
         Using the well-known principles of interferometry coupled with a solid
         state ccd camera for laser spot location, etch depths are measured using      interference patterns reflected from the substrate.

  • OES:
         Film layers are detected using light emitted from the plasma. Spectral      changes occur when etch of the target layers are achieved.

  • OEI:
         Target film thickness is tracked and measured via an optical emission.
         By optically tracking film thickness or etch depth in real time,
         EndpointWorks™ can counteract variables and produce accurate
         results every time.

  • System Parameters:
         EndpointWorks™ is capable of being programmed with various system      parameters to detect changes triggered at endpoint.
         Examples: throttle valve position, matching capacitor positions.

  • Custom Inputs:
         EndpointWorks™ is capable of customer specific external inputs.
         Examples: RGA, ellipsometer.

SpectraWorks

SpectraWorks is a legacy OES endpoint control system.

  • SpectraWorks is currently available at version 5.1

  • SpectraWorks is upgradeable to EndpointWorks™ with recipe transferability.

For more information , please contact us at information@plasmatherm.com or at +1.727.577.4999

 
 
 
  legal notice | privacy policy | site map | ©2010-2014 Plasma-Therm