ORBIS™ 3000
Fully automated wafer handling platform enabling full process integration for volume MEMS production.


ORBIS™ Platforms

The new generation of ORBIS platforms enable the most advanced processing capability from research, to commercial R&D through to high-volume manufacturing.

The ORBIS platform approach delivers many benefits to our customers, such as:

  • Upgrade paths from R&D through to full-scale production
  • Cost-effective solutions—lab or fab
  • Seamless process transfer—from lab to fab
  • Low cost of ownership
  • End point detection
  • Single wafer processing






ORBIS™ 1000 
Single-wafer vacuum loadlock for low-volume MEMS production

ORBIS™ Alpha™
XeF2 and HF etch development platform for cost-effective MEMS research

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