MEMS & Sensors

The digital transformation is here, powered by a plethora of microelectromechanical systems (MEMS) and sensors. From mobile and wearable consumer devices to automotive, medical, and industrial Internet of Things (IIOT) applications, MEMS and sensors are critical for capturing data that is processed to inform our actions.

MEMS fabrication is not standardized and spans a variety of technology areas, including electronics, fluidics, mechanics, magnetics, acoustics, and optics. Each unique design can require many different etch, deposition, and release steps. Our platforms are the centerpiece of our process technologies and cover a wide variety of applications, including etch, deposition, strip, material modification, and singulation.

Etch

Our equipment and processes for deep silicon and oxide etching let you create features in silicon and SOI with vertical, high aspect ratios.

Deposition

We’ve fine-tuned an array of plasma-enhanced deposition processes to help you achieve the film features you need for optimal device performance.

Sacrificial Layer Removal and PR Strip

Our unique high-density radical flux (HDRF™) technology offers stiction-free release of structures and gentle removal of PR masks.

MEMS & Sensor Applications

Today’s vehicles have as many as 100 MEMS and sensors (such as microphones, accelerometers, and engine performance sensors), and that number is increasing. The future of electric and autonomous vehicles relies on the reliability of MEMS devices.

The accuracy and reliability of tiny MEMS make them ideal for use in wearable devices that gather all types of data.

From diagnostic tools to drug delivery systems, MEMS and sensors are improving the quality and availability of healthcare worldwide.

MEMS and sensors make smart manufacturing possible. For example, vibration sensing allows for predictive maintenance and condition monitoring of factory tools.