Plasma-Therm produces plasma etch, deposition, and singulation tools,
including ICP, RIE, DSE™, IBE, IBD, PECVD, HDPCVD, and HDRF™.

 
Advanced Packaging Wireless Photonics Solid State Lighting MEMS/NEMS Nanotechnology Renewable Energies Data Storage Photomask Research and Development
 
 
 

 

VLSI_2017 MEMSSTAR DISCO