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Plasma-Therm produces plasma etch, deposition, and singulation tools,
including ICP, RIE, DSE™, IBE, IBD, PECVD, HDPCVD, and HDRF™ F.A.S.T.™-ALD.

 
Advanced Packaging Wireless Photonics Solid State Lighting MEMS/NEMS Nanotechnology Renewable Energies Data Storage Photomask Research and Development