The QuaZar IBE system, whether configured for R&D or production, delivers best-in-class uniformity and throughput and the lowest cost of ownership.
Hardware
- Cluster combinations (up to three modules) or single process module configurations
- Accommodates 150mm and 200mm wafers and 9.5-inch pallets; scalable to 300mm
- Advanced motion controls provide up to 40% higher throughput
- Wide energy range – ultra-low to high power
- Long-life Marathon grids sets provide up to three times longer life than standard grids
- Precision substrate tilt and rotation for maximum profile control
- Programmable virtual shutter
- Scanning motion available with optional planetary configuration when ultra-high uniformity is required
Control System
The Cortex® control system provides a stable, user-friendly control interface designed for efficiency and productivity. Cortex benefits include:
- Graphical, SEMI-standard (E-95) interface
- Comprehensive recipe editing and process parameter data logging and charting (real-time and post-processing)
- Automated clean and conditioning routines with configurable triggers
- Factory automation host interface (with optional SECS/GEM license)
- User-level access control
- Auto logging of alarms, jobs, calibration, and resource usage
- Integrated with GLANCE™ data logging and visualization tool
- Same feature-rich control system as used on high-volume production systems
Process
- Challenging materials (e.g., Ni, Fe, ScAlN, PZT, LTO, LNO)
- <2% 3-sigma (200mm) and all tilt angles available
- Applications for data storage, advanced memory, and quantum applications
- Profile control (e.g., gratings) and avoidance of sidewall redeposition
- RIBE (reactive ion-beam etching) mode capable
